[23p-P06-1~16] 6.4 Thin films and New materials

[23p-P06-2] Sputter epitaxy and characterization of Mn doped ITO films

〇Saiki Kitagawa¹, Ryoto Kawamura¹, Shintaro Takehisa¹, Toshihiro Nakamura^1,2 (1.Graduate School of Human and Environmental Studies, Kyoto Univ., 2.ILAS, Kyoto Univ.)

Keywords:transparent conducting film, diluted magnetic semiconductor, epitaxial growth

In this study, we focused on the Mn-doped ITO thin film, which is an oxide-based dilute magnetic semiconductor. This material is an ITO thin film with a small amount of Mn magnetic element added, and has a low electrical resistance and high transmission in the visible light region. In addition to this, room temperature ferromagnetic is exhibited. In this study, we developed an epitaxial growth technique for Mn-doped ITO thin films and evaluated the electrical, optical, and magnetic properties of the thin films. Also showed excellent magnetic properties.