[24p-D114-1~11] 8.3 Plasma nanotechnology

[24p-D114-3] Control of Particle Size Distribution of Nanoparticles Synthesized by Modulated Tandem Induction Thermal Plasmas with Different Modulation Waveforms

〇Yasunori Tanaka¹, Ryudai Furukawa¹, Yurina Nagase¹, Tomoya Fuwa¹, Yusuke Nakano¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Keitaro Nakamura² (1.Kanazawa Univ., 2.Nisshin Seifun Gr.)

Keywords:Nanoparticles, Inductively coupled thermal plasma, Mass production

In the nanoparticle synthesis by the "Tandem-MITP + TCFF method", which is a combination of the originally developed tandem type modulation induced thermal plasma (Tandem-MITP) and the time-controlled feeding of feedstock method (TCFF method), the mean size of nanoparticles synthesized is markedly affected by the thermofluid flow field in thermal plasmas. In this report, we experimentally investigated the effect of modulation waveform into rectangular, saw-tooth and triangle waveforms on the particle size distribution in the synthesized Si nanoparticles.