Preparation of SiCN Film by Reactive RF-UBMS with Nitrogen

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

Thu. Mar 24, 2022 1:30 PM - 4:15 PM E204 (E204)

Hiroki Akasaka(Tokyo Tech), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)

3:15 PM - 3:30 PM

〇Takahiro Bando¹, Hayato Sakai¹, Toru Harigai¹, Hirofumi Takikawa¹ (1.Toyohashi Univ.)

Keywords:UBMS, SiCN