The 69th JSAP Spring Meeting 2022

Presentation information

Print

Oral presentation

CS Code-sharing session » 【CS.9】 Code-sharing Session of 13.7 & 15.6

[24p-E302-1~16] CS.9 Code-sharing Session of 13.7 & 15.6

Thu. Mar 24, 2022 2:00 PM - 6:15 PM E302 (E302)

Masashi Kato(Nagoya Inst. of Tech.), Takuma Kobayashi(Osaka Univ.)

2:30 PM - 2:45 PM

[24p-E302-3] [The 43rd JSAP Young Scientist Award Speech] Formation of high-quality SiC/SiO2 interfaces by suppressing SiC oxidation

〇Takuma Kobayashi1,2, Takafumi Okuda1, Keita Tachiki1, Koji Ito1, Yu-ichiro Matsushita2, Tsunenobu Kimoto1 (1.Kyoto Univ., 2.Tokyo Tech)

Keywords:SiC, MOSFET, Interface State Density