[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [25a-E103-8] A Non-Contact Out-of-Plane Vibratory Energy Harvester with an Electric Double Layer Electret

〇(BC)Keigo Nota¹, Kentaro Tamura¹, Kazumoto Miwa², Shimpei Ono², Daisuke Yamane¹ (1.Ritsumeikan Univ., 2.Central Research Inst. of Electric Power Industry)

Keywords:Electric double layer electret, Vibratory energy harvesting, Out-of-plane