[25a-E301-1~9] CS.9 Code-sharing Session of 13.7 & 15.6

[25a-E301-6] Measurement of N concentration in SiC crystals by soft X-ray emission

〇Sakiko Kawanishi¹ (1.Tohoku Univ.)

Keywords:silicon carbide, nitrogen, soft X-ray emission

N concentration in SiC crystals was quantitatively evaluated using a soft X-ray emission spectrometer (SXES) in FE-EPMA. The N concentration over 2×10¹⁹ cm^-3 was successfully measured by SXES. The advantages of this method will also be presented in the presentation.