3:30 PM - 3:45 PM
[25p-D114-10] Effect of lattice strain in Ge layer on Si by trench-filling growth
Keywords:Ge, Trench-filling growth
Oral presentation
15 Crystal Engineering » 15.5 Group IV crystals and alloys
Fri. Mar 25, 2022 1:00 PM - 5:15 PM D114 (D114)
Keisuke Arimoto(Univ. of Yamanashi), Katsunori Makihara(Nagoya Univ.)
3:30 PM - 3:45 PM
Keywords:Ge, Trench-filling growth