The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.5 Group IV crystals and alloys

[25p-D114-1~16] 15.5 Group IV crystals and alloys

Fri. Mar 25, 2022 1:00 PM - 5:15 PM D114 (D114)

Keisuke Arimoto(Univ. of Yamanashi), Katsunori Makihara(Nagoya Univ.)

3:15 PM - 3:30 PM

[25p-D114-9] CVD growth of Ge epitaxial layer on patterned Si substrate

〇(M1)FAIZ FAIZ MOHD1, Jose A. Piedra-Lorenzana1, Takeshi Hizawa1, Tetsuya Nakai2, Yasuhiko Ishikawa1 (1.Toyohashi Uni of Tech, 2.SUMCO)

Keywords:Ge, CVD growth, Ge epitaxial layer