[25p-E301-1~8] CS.9 Code-sharing Session of 13.7 & 15.6

[25p-E301-7] Research on imaging technique for transient thermal diffusion processes in silicon wafers by Optical-Interference Contactless Thermometry (OICT)

〇(M1)Kotaro Matsuguchi¹, Keiya Fujimoto¹, Jiawen Yu¹, Hiroaki Hanafusa¹, Takuma Sato¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

Keywords:Silicon, Temperature measurement, OICT