The 69th JSAP Spring Meeting 2022

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[25p-E305-1~18] 6.1 Ferroelectric thin films

Fri. Mar 25, 2022 1:30 PM - 6:30 PM E305 (E305)

Isaku Kanno(Kobe Univ.), Takeshi Kobayashi(AIST), Shinya Yoshida(Tohoku Univ.)

5:30 PM - 5:45 PM

[25p-E305-15] Deposition of epitaxial sol-gel PZT thin film on Si substrate

〇Yuichi Kanayama1, SangHyo Kweon1, Goon Tan2, Isaku Kanno1 (1.Kobe Univ., 2.Osaka pref. Univ.)

Keywords:piezoelectric thin film, epitaxial, sol-gel