The 69th JSAP Spring Meeting 2022

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[25p-F307-1~16] 6.4 Thin films and New materials

Fri. Mar 25, 2022 1:30 PM - 6:00 PM F307 (F307)

Katsuhisa Tanaka(Kyoto Univ.), Tetsuo Tsuchiya(AIST)

2:30 PM - 2:45 PM

[25p-F307-5] Fabrication of La1-xBaxF3-x epitaxial thin films using CF4-assisted sputtering

〇Keisuke Fukatsu1, Ryota Shimizu1, Xin Dai1, Shigeru Kobayashi1, Kazunori Nishio1, Taro Hitosugi1 (1.Tokyo Tech)

Keywords:metal fluoride thin films, epitaxial thin film, all solid state battery