2:30 PM - 2:45 PM
△ [25p-F307-5] Fabrication of La1-xBaxF3-x epitaxial thin films using CF4-assisted sputtering
Keywords:metal fluoride thin films, epitaxial thin film, all solid state battery
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
Fri. Mar 25, 2022 1:30 PM - 6:00 PM F307 (F307)
Katsuhisa Tanaka(Kyoto Univ.), Tetsuo Tsuchiya(AIST)
2:30 PM - 2:45 PM
Keywords:metal fluoride thin films, epitaxial thin film, all solid state battery