The 69th JSAP Spring Meeting 2022

Presentation information

Poster presentation

3 Optics and Photonics » 3.13 Semiconductor optical devices

[25p-P09-1~11] 3.13 Semiconductor optical devices

Fri. Mar 25, 2022 4:00 PM - 6:00 PM P09 (Poster)

4:00 PM - 6:00 PM

[25p-P09-6] Proposal and Characteristic Analysis of Lateral-Electric-Field Electro-Absorption Modulator with Insulation Region by H+ ion implantation

〇(M2)Pengjun Yu1 (1.Waseda Univ)

Keywords:Electro-Absorption Modulator, Quantum Dot

A Quantum Dot (QD) laser has superior properties such as low threshold current and high temperature stability, and it is predicted to be a high-performance light source combined with other optical components using quantum dot intermixing (QDI) technology. An electro-absorption modulator (EAM) is an important integrated optical component because of its high-speed operation and compactness, and lateral-electric-field EAM has recently been highlighted for high-speed modulation. In this paper, we present a new lateral-electric-field EAM with an insulation area produced by proton (H+) implantation, which has the benefit of being easier to fabricate than the prior one, and we evaluate its fundamental performance.