10:15 AM - 10:30 AM
[26a-F308-5] Ultrafast pump-probe measurement of scanning electron microscopy by vertically illuminating configuration
Keywords:scanning electron microscopy, time-resolved measurement, semiconductor
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
Sat. Mar 26, 2022 9:00 AM - 11:15 AM F308 (F308)
Mitsunori Kitta(AIST), Takafumi Ishida(Nagoya University)
10:15 AM - 10:30 AM
Keywords:scanning electron microscopy, time-resolved measurement, semiconductor