[26a-P03-1~15] 8 Plasma Electronics(Poster)

[26a-P03-7] Development of Plasma-Assisted Reactive Processes for Large-Area Uniform Formation of High-Mobility IGZO Thin Film Transistors

〇Kosuke Takenaka¹, Tomoki Yoshitani¹, Susumu Toko¹, Giichiro Uchida², Akinori Ebe³, Yuichi Setsuhara¹ (1.Osaka Univ., 2.Meijo Univ., 3.EMD Corp.)

Keywords:IGZO, Sputtering