The 69th JSAP Spring Meeting 2022

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics(Poster)

[26a-P03-1~15] 8 Plasma Electronics(Poster)

Sat. Mar 26, 2022 9:30 AM - 11:30 AM P03 (Poster)

9:30 AM - 11:30 AM

[26a-P03-8] Surface analysis of polyimide film treated by Ar/O2 atmospheric-pressure microwave plasma

〇Yuki Iwata1, Tomohiro Ogasawara1, Haruka Suzuki1, Hirotaka Toyoda1,2 (1.Nagoya Univ., 2.NIFS)

Keywords:ashing, XPS