The 69th JSAP Spring Meeting 2022

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[26p-F408-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

Sat. Mar 26, 2022 1:30 PM - 4:30 PM F408 (F408)

Yasuyoshi Kurokawa(Nagoya Univ.), Takuya Matsui(AIST)

4:15 PM - 4:30 PM

[26p-F408-11] Evaluation of oxide layer in fluorine-implanted poly-Si/SiO2/Si structure

〇Katsuto Tanahashi1, Tomihisa Tachibana1, Hidetaka Takato1 (1.AIST)

Keywords:oxide layer, fluorine implantation, fixed charge