Hiroyoshi Hongoh

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:00 PM - 1:15 PM

[15p-B410-1] Analysis of Lot-to-lot Variation in Minimal Fab

〇Hiroyoshi Hongoh¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)