kazushige sato

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[15a-B410-4] Development of Minimal Fab laser heating tool for low-temperature processing at 300 - 600℃

〇kazushige sato^1,3, Takashi Chiba^1,3, Masao Terada^1,3, Kengo Hamada^1,3, Sommawan Khumpuang^1,2, Shiro Hara^1,2,4 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp., 4.Hundred)

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