Tomoya Tsutsumi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:30 PM A404 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[15p-A404-1~19] 6.1 Ferroelectric thin films

6:00 PM - 6:15 PM

[15p-A404-18] Evaluation of the effect of prior plasma nitriding on plasma-oxidized AlScN by AR-HAXPES

〇Tomoya Tsutsumi¹, Kazuki Goshima¹, Yoshiharu Kirihara¹, Tatsuki Okazaki², Akira Yasui³, Kuniyuki Kakushima⁴, Yuichiro Mitani^1,2, Hiroshi Nohira¹ (1.Tokyo City Univ, 2.Adv. Res. Lab., Tokyo City Univ., 3.JASRI, 4.Tokyo Institute of Technology)

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