WENCHANG YEH

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

[15p-B410-10] Investigation on characteristics and variation of low-temperature single crystal Si TFTs

〇WENCHANG YEH¹, Masato Ohya¹ (1.Shimane Univ.)