Longxiang Men

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[15p-B410-11] Evaluation of Crystal Defects in the Sidewall of Si Trench using Photoluminescence Spectroscopy

〇(M2)Longxiang Men¹, Yuta Ito¹, Junghyeok Shin¹, Ryo Yokogawa^1,2, Atsushi Ogura^1,2, Kazuto Kawakatsu³, Jun Yoshigiwa³, Koichiro Saga³, Hayato Iwamoto³ (1.Meiji Univ., 2.MREL, 3.Sony Semiconductor Solutions Corporation)

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