Yuki Okamoto

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:15 PM - 5:30 PM

[15p-B410-15] Piezoelectric Valve Micropump Using UV Laser-Patterned Adhesive Sheet

〇Yuki Okamoto¹, Yasuyuki Yamamoto¹, Tomoya Muramoto¹, Masaaki Ichiki¹, Takeshi Kobayashi¹ (1.AIST)