Hajime Karasawa

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[15p-B410-4] Study of initial surface adsorption behavior for Si₂H₆ utilizing molecular simulation

〇Hajime Karasawa¹, Yuki Yoshimoto¹, Shogo Shimada¹, Tomoya Nagahashi¹, Ryota Hariike¹ (1.KOKUSAI ELECTRIC)