Takuya Ishihara

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA02 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PA02-1~12] 8 Plasma Electronics (Poster)

4:00 PM - 6:00 PM

[15p-PA02-3] Numerical analysis of power dependence on properties of low-pressure Ar/CH₄ plasma for effective utilization of raw material gas

〇(B)Takuya Ishihara¹, Shun Sasaki¹, Akinori Oda¹, Hiroyuki Kousaka² (1.Chiba Inst. Technol., 2.Gifu Univ.)