Daiki Morohoshi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA04 (Poster)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-PA04-1~3] 13.3 Insulator technology

4:00 PM - 6:00 PM

[15p-PA04-1] Charge trapping characteristics of manganese-doped and vanadium-dope silicon nitride films

〇Daiki Morohoshi¹, Akari Matsumoto¹, Yuta Nishigaki¹, Tomoya Satonaka², Yuto Ito², Yuki Arakawa², Takumi Abe², Kiyoteru Kobayashi^1,2 (1.Tokai Univ. Grad. Sch. Eng., 2.Tokai Univ. Sch. Eng.)

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