Di Pu

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA04 (Poster)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-PA04-1~3] 13.3 Insulator technology

4:00 PM - 6:00 PM

[15p-PA04-2] Deposition temperature dependence of amount of residual OH groups in low-temperature Si oxide films after in-situ post-deposition heating

〇Di Pu¹, Susumu Horita¹ (1.JAIST)