Tomoki Oku

→ Search for Tomoki Oku in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2023 4:00 PM - 6:00 PM PA04 (Poster)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-PA04-1~3] 13.3 Insulator technology

4:00 PM - 6:00 PM

[15p-PA04-3] Formation energy at a stable site for diatomic molecules in Si₃N₄ and SiO₂ films

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)