Haruhito Kato

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:15 AM - 10:45 AM A402 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[16a-A402-1~6] 8.1 Plasma production and diagnostics

10:30 AM - 10:45 AM

[16a-A402-6] Effect of power modulation scheme on ion composition in a dual-frequency capacitively-coupled Ar/C₄F₈/O₂ plasma

〇Haruhito Kato¹, Yudai Akatuka¹, Yuto Seki¹, Shuichi Kuboi¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ, 2.cLPS, Nagoya Univ, 3.NIFS)