Ryo Ueda

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 10:30 AM - 12:00 PM E102 (Building No. 12)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16a-E102-1~6] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:30 AM - 10:45 AM

[16a-E102-1] Homoepitaxial growth of (001) β-Ga₂O₃ thin films by mist CVD

〇Ryo Ueda¹, Hiroyuki Nishinaka¹, Tatsuji Nagaoka², Hiroki Miyake², Masahiro Yoshimoto¹ (1.Kyoto Inst. Tech., 2.MIRISE Technologies Corp.)