Kazuhiro Mochizuki

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[16p-A301-7~12] 13.7 Compound and power devices, process technology and characterization

5:00 PM - 5:15 PM

[16p-A301-11] Re-evaluation of electronic stopping cross section for channeled-ion implantation of Al into 4H-SiC (0001)

〇Kazuhiro Mochizuki¹, Tomoaki Nishimura¹, Tomoyoshi Mishima¹ (1.Hosei Univ.)