5:00 PM - 5:15 PM
[16p-A301-11] Re-evaluation of electronic stopping cross section for channeled-ion implantation of Al into 4H-SiC (0001)
Keywords:SiC, Al, electronic stopping cross section
Presentation information
Oral presentation
13 Semiconductors » 13.7 Compound and power devices, process technology and characterization
[16p-A301-7~12] 13.7 Compound and power devices, process technology and characterization
Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)
Katsuhiro Kutsuki(Toyota Central R&D Labs.)