Mao Xu

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

6:00 PM - 6:15 PM

▲ [16p-A403-18] Effects of Annealing on Thermal Boundary Resistance of Low-k Interlayer Dielectrics

〇Mao Xu¹, Zhi Cao², Akitoshi Okino¹, Tianzhuo Zhan³ (1.FIRST, Tokyo Tech, 2.Waseda Univ., 3.Toyo Univ.)