Yoko Sato

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B401 (Building No. 2)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[16p-B401-1~13] 15.4 III-V-group nitride crystals

4:45 PM - 5:00 PM

[16p-B401-10] Endpoint detection of Eu-doped GaN layer during etching process using optical emission spectroscopy

〇Yoko Sato¹, Shojiro Konno¹, Atsushi Motoyama¹, Masaki Yokoi¹, Makoto Matsuhama², Shuhei Ichikawa³, Kazutsune Miyanaga³, Norio Kanzaki³, Yasufimi Fujiwara³ (1.HORIBA STEC, 2.HORIBA, 3.Osaka Univ.)

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