Shinji Migita

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

1:00 PM - 1:30 PM

[16p-B508-1] [The 44th Paper Award Speech] Acceleration of Ferroelectric Phase Formation in HfO₂-ZrO₂ Nanolaminate Structures

〇Shinji Migita¹, Hiroyuki Ota¹, Shutaro Asanuma¹, Yukinori Morita¹, Akira Toriumi² (1.AIST, 2.Univ. Tokyo)