Yusuke Ohtsuka

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

4:00 PM - 4:15 PM

△ [16p-B508-11] Analysis of InGaAs interface state reduction by deoisition of plasma ALD PO_x

〇Yusuke Ohtsuka¹, Keigo Nakamura¹, Ryoji Arai¹, Ryosuke Matsumoto¹, Itaru Oshiyama¹, Shinichi Yoshida¹, Tomoyuki Hirano¹, Hayato Iwamoto¹ (1.Sony Semiconductor Solutions)