Yusaku Tanahashi

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

4:30 PM - 4:45 PM

[16p-B508-13] Characterization of the multiple thin dielectric films in depth direction

〇Yusaku Tanahashi¹, Keiko Inoue¹, Hirofumi Seki¹ (1.Toray Research Center)