Yohei Otani

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

5:30 PM - 5:45 PM

[16p-B508-17] Electrical Properties of Al₂O₃ Thin Films Deposited on p-type Ge Substrates at Low Temperatures

Tatsuya Yokohira¹, Daichi Yamada¹, Atsuki Okawa², Tetsuya Sato², 〇Yohei Otani¹ (1.Suwa Univ. of Sci., 2.Univ. of Yamanashi)