The 70th JSAP Spring Meeting 2023

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Noriyuki Taoka(Nagoya Univ.), Yoshiki Yamamoto(Renesas Electronics)

5:30 PM - 5:45 PM

[16p-B508-17] Electrical Properties of Al2O3 Thin Films Deposited on p-type Ge Substrates at Low Temperatures

Tatsuya Yokohira1, Daichi Yamada1, Atsuki Okawa2, Tetsuya Sato2, 〇Yohei Otani1 (1.Suwa Univ. of Sci., 2.Univ. of Yamanashi)

Keywords:germanium, high-k, Ge-MIS