Preparation and evaluation of GeO<sub>2 </sub>film by two-step oxidation

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Noriyuki Taoka(Nagoya Univ.), Yoshiki Yamamoto(Renesas Electronics)

5:15 PM - 5:30 PM

〇(M1)Hajime Saito¹, Yuta Tsuchiya¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor