Toshinori Miura

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 3:30 PM

[16p-PA03-5] Development of the atmospheric pure ozone water generator

〇Toshinori Miura¹, Naoki Kato¹, Akitoshi Nakagawa¹, Satoshi Seike¹ (1.Meidensha Corp.)