Yusuke Sato

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA04 (Poster)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[16p-PA04-1~24] 13.7 Compound and power devices, process technology and characterization

1:30 PM - 3:30 PM

[16p-PA04-4] Fabrication Process of Double-Implanted Metal-Oxide-Semiconductor Field-Effect Transistor of 4H-SiC Utilizing Wet Oxidation

〇Yusuke Sato^1,2, Satoshi Watanabe², Masao Sakuraba^1,2, Shigeo Sato^1,2 (1.Tohoku Univ., 2.RIEC)