Hironobu Seki

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:30 AM B309 (Building No. 2)

Oral presentation
| 17 Nanocarbon Technology
| 17.2 Graphene

[17a-B309-1~10] 17.2 Graphene

10:30 AM - 10:45 AM

[17a-B309-7] In-situ observation of graphene crystallinity in the device process by the backside Raman spectroscopy

〇(M1)Hironobu Seki¹, Koichi Tamura¹, Chao Tang¹, Hirokazu Hukidome¹, Akira Satou¹, Taiichi Otuji¹ (1.Tohoku Univ.)