Tatsuya Kitai

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:00 PM - 5:15 PM

[17p-A205-16] Investigation of plasma dry etching of yttrium iron garnet using gas mixtures of argon and methane-hydrogen

〇(M1)Tatsuya Kitai¹, Siyuan Gao², Satoshi Iwamoto², Yasutomo Ota¹ (1.Keio Univ., 2.RCAST, the Univ. of Tokyo)