The 70th JSAP Spring Meeting 2023

RYOKO SUGANO

Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment