Naoki Tamura

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 1:45 PM

[17p-A205-3] Impact of nitrogen and water vapor addition on silicon nanocone formation by micro-wave hydrogen plasma

〇Naoki Tamura¹, Toshimitsu Nomura¹, Hiroaki Kakiuchi¹, Hiromasa Ohmi¹ (1.Osaka Univ.)