Takahiro Goya

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:00 PM - 3:15 PM

△ [17p-A205-9] Characterization of Structure Deformation in Low-k Dielectric Films using Cyclic Load—unloading Nanoindentation Technique

〇Takahiro Goya¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)