Kosuke Saito

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 6:00 PM A301 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[17p-A301-1~18] 13.7 Compound and power devices, process technology and characterization

4:30 PM - 4:45 PM

[17p-A301-13] Isolation of N-polar GaN HEMT by digital etching

〇Kosuke Saito¹, Sano Haruki¹, Nakagawa Ryo¹, Makabe Isao², Nakata Ken², Gotow Takahiro¹, Miyamoto Yasuyuki¹ (1.Tokyo Tech, 2.Sumitomo Electric Industries)

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