Ryo Tanaka

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 6:00 PM A301 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[17p-A301-1~18] 13.7 Compound and power devices, process technology and characterization

1:30 PM - 1:45 PM

[17p-A301-3] MOS channel characteristics of Mg-implanted lateral MOSFET activated by UHPA

〇Ryo Tanaka¹, Shinya Takashima¹, Katsunori Ueno¹, Tsurugi Kondo¹, Takuro Inamoto¹, Masaharu Edo¹, Michal Bockowski², Tetsu Kachi³ (1.Fuji Electric, 2.Unipress, 3.Nagoya Univ.)

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