YUTA GOTO

→ Search for YUTA GOTO in Google Scholar

Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:00 PM B414 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[17p-B414-1~15] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:00 PM - 2:15 PM

△ [17p-B414-5] Graphene Oxide Assisted Etching of Si under Negative Bias Condition

〇(M1)YUTA GOTO¹, WATARU KUBOTA¹, TORU UTSUNOMIYA¹, TAKASHI ICHII¹, HIROYUKI SUGIMURA¹ (1.Kyoto Univ.)