2:45 PM - 3:00 PM
△ [17p-D511-6] Development of Low Thermal Conductive MSiN (M=Transition Metal Elements) Nitride Film
〇Masaki Adachi1, Toshiaki Fujita1 (1.Mitsubishi Materials Corp.)
Fri. Mar 17, 2023 1:15 PM - 5:30 PM D511 (Building No. 11)
2:45 PM - 3:00 PM
〇Masaki Adachi1, Toshiaki Fujita1 (1.Mitsubishi Materials Corp.)